Scanning mirrors in near field optical microscope

专利名称：Scanning mirrors in near field optical

microscope having super resolution

发明人：Seung-Han Park,Dae-Geun Kim,Hong-Gyu

Ahn,Eung-Jang Lee

申请号：US12739266申请日：20080218公开号：US08724116B2公开日：20140513

专利附图：

摘要：Provided is a scanning optical measurement apparatus having super resolution.The scanning optical measurement apparatus includes: a light source; a first lens, which

focuses light irradiated from the light source; a first pin hole, which is disposed next tothe first lens; a second lens, which diverges light that passed through the first pin hole; ascanning unit, which scans light that passed through the second lens; a first beam splitter,which is disposed between the second lens and the scanning unit; an object lens, whichfocuses light that passed through the scanning unit on the subject; a slide, where thesubject is placed; an optical probe, which reflects the light that passed through thesubject after being irradiated from the light source; a second beam splitter, which isdisposed between the scanning unit and the object lens; a first optical detector, whichdetects the light that passed through the first beam splitter after being reflected fromthe subject and the optical probe; a second pin hole, which is disposed between the firstbeam splitter and the first optical detector; and a second optical detector, which detectslight that passed through the second beam splitter after being reflected from thesubject and the optical probe.

申请人：Seung-Han Park,Dae-Geun Kim,Hong-Gyu Ahn,Eung-Jang Lee

地址：Seoul KR,Seoul KR,Seoul KR,Seoul KR

国籍：KR,KR,KR,KR

代理机构：Rothwell, Figg, Ernst & Manbeck, P.C.

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